Signal Measurement and Estimation Techniques for Micro and Nanotechnology  discusses micro, nano and robotic cells and gives a state-of-the-art  presentation of the different techniques and solutions to measure and estimate  signals at the micro and nano scale. New technologies and applications such as  micromanipulation (artificial components, biological objects), micro-assembly  (MEMS, MOEMS, NEMS) and material and surface force characterization are covered.  The importance of sensing at the micro and nano scale is presented as a key  issue in control systems, as well as for understanding the physical phenomena of  these systems. The book also:     Explains issues that make signal measurement and estimation techniques  difficult at the micro-nano-scale and offers solutions    Discusses automated micro-assembly, and control of micro-nano robotic devices    Presents and links signal measurement and estimation techniques for  micro-nano scale systems with microfabrication methods, sensors integration and  control schemesSignal Measurement and Estimation Techniques for Micro and  Nanotechnology is a must-read for researchers and engineers working in MEMS and  control systems.

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